Gupta, AnshulAnshulGuptaVarela Pedreira, OlallaOlallaVarela PedreiraArutchelvan, GouthamGouthamArutchelvanZahedmanesh, HoumanHoumanZahedmaneshDevriendt, KatiaKatiaDevriendtHanssen, FrederikFrederikHanssenTao, ZhengZhengTaoRitzenthaler, RomainRomainRitzenthalerWang, ShouhuaShouhuaWangRadisic, DunjaDunjaRadisicKenis, KarineKarineKenisTeugels, LieveLieveTeugelsSebaai, FaridFaridSebaaiLorant, ChristopheChristopheLorantJourdan, NicolasNicolasJourdanChan, BTBTChanSubramanian, SujithSujithSubramanianSchleicher, FilipFilipSchleicherHopf, TobyTobyHopfPeter, AntonyAntonyPeterRassoul, NouredineNouredineRassoulDebruyn, HaroenHaroenDebruynDemonie, IngridIngridDemonieSiew, Yong KongYong KongSiewChiarella, ThomasThomasChiarellaBriggs, BasoeneBasoeneBriggsZhou, DaisyDaisyZhouRosseel, ErikErikRosseelDe Keersgieter, AnAnDe KeersgieterCapogreco, ElenaElenaCapogrecoDentoni Litta, EugenioEugenioDentoni LittaBoccardi, GuillaumeGuillaumeBoccardiBaudot, SylvainSylvainBaudotMannaert, GeertGeertMannaertBontemps, NoemieNoemieBontempsSepulveda Marquez, AlfonsoAlfonsoSepulveda MarquezMertens, SofieSofieMertensKim, Min-SooMin-SooKimDupuy, EmmanuelEmmanuelDupuyVandersmissen, KevinKevinVandersmissenPaolillo, SaraSaraPaolilloCousserier, JorisJorisCousserierYakimets, DmitryDmitryYakimetsLazzarino, FredericFredericLazzarinoChehab, BilalBilalChehabFavia, PaolaPaolaFaviaDrijbooms, ChrisChrisDrijboomsJaysankar, ManojManojJaysankarMorin, PierrePierreMorinAltamirano Sanchez, EfrainEfrainAltamirano SanchezMitard, JeromeJeromeMitardWilson, ChrisChrisWilsonHolsteyns, FrankFrankHolsteynsBoemmels, JuergenJuergenBoemmelsDemuynck, StevenStevenDemuynckTokei, ZsoltZsoltTokeiHoriguchi, NaotoNaotoHoriguchi2021-10-282021-10-2820200018-9383https://imec-publications.be/handle/20.500.12860/35217Buried power rail integration with FinFETs for ultimate CMOS scalingJournal articlehttps://ieeexplore.ieee.org/document/9257401