Experimental study of sub-DSA resolution assist features (SDRAF)

Yi, LindaLindaYiBekaert, JoostJoostBekaertGronheid, RoelRoelGronheidVandenberghe, GeertGeertVandenbergheNafus, KathleenKathleenNafusWong, H.-S. PhilipH.-S. PhilipWong2021-10-232021-10-232015https://imec-publications.be/handle/20.500.12860/26218Experimental study of sub-DSA resolution assist features (SDRAF)Proceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2210779