Urbanowicz, AdamAdamUrbanowiczShamiryan, DenisDenisShamiryanKim, DongchanDongchanKimBaklanov, MikhaïlMikhaïlBaklanov2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13007Effect of helium plasma on low-k damage during dry resist stripProceedings paperhttp://www.pesm2007.be/