Growth and characterization of DH-HEMT structures with various AlGaN barriers and AlN interlayers on 200mm Si(111) substrates

Zhao, MingMingZhaoSaripalli, YogaYogaSaripalliKandaswamy, Prem KumarPrem KumarKandaswamyLiang, HuHuLiangFirrincieli, AndreaAndreaFirrincieliDecoutere, StefaanStefaanDecoutereVancoille, EricEricVancoille2021-10-222021-10-2220141610-1642https://imec-publications.be/handle/20.500.12860/24889Growth and characterization of DH-HEMT structures with various AlGaN barriers and AlN interlayers on 200mm Si(111) substratesJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssc.201300478/abstract