Hetero Ge/SI and Si1-xGex/Si nanowires for vertical microelectronics devices

Iacopi, FrancescaFrancescaIacopiRooyackers, RitaRitaRooyackersVandooren, AnneAnneVandoorenVanherle, WendyWendyVanherleTakeuchi, ShotaroShotaroTakeuchiHikavyy, AndriyAndriyHikavyyLoo, RogerRogerLooMilenin, AlexeyAlexeyMileninLeonelli, DanieleDanieleLeonelliArstila, KaiKaiArstilaBender, HugoHugoBenderCaymax, MattyMattyCaymaxDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15523Hetero Ge/SI and Si1-xGex/Si nanowires for vertical microelectronics devicesProceedings paper