Dummy design characterization for STI CMP with fixed abrasive

Tsvetanova, DianaDianaTsvetanovaDevriendt, KatiaKatiaDevriendtOng, PatrickPatrickOngVandeweyer, TomTomVandeweyerDelande, TinneTinneDelandeChew, Soon AikSoon AikChewHoriguchi, NaotoNaotoHoriguchiStruyf, HerbertHerbertStruyf2021-10-222021-10-222014-11https://imec-publications.be/handle/20.500.12860/24638Dummy design characterization for STI CMP with fixed abrasiveProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=7017279