Van Gerwen, PeterPeterVan GerwenLaureyn, WimWimLaureynCampitelli, AndrewAndrewCampitelliJacobs, PhilippePhilippeJacobsDetemple, P.P.DetempleBaert, KrisKrisBaertSansen, WillyWillySansenMertens, RobertRobertMertens2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4821Cost effective realization of nanoscaled interdigitated electrodesJournal article