O'Connor, RobertRobertO'ConnorPantisano, LuigiLuigiPantisanoDegraeve, RobinRobinDegraeveKauerauf, ThomasThomasKaueraufKaczer, BenBenKaczerRoussel, PhilippePhilippeRousselGroeseneken, GuidoGuidoGroeseneken2021-10-172021-10-1720080021-8979https://imec-publications.be/handle/20.500.12860/14237Electron energy dependence of defect generation in high-k gate stacksJournal articlehttp://scitation.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=JAPIAU000103000006064503000001&idtype=cvips&prog=search