Quantification and depth profiling of a ZrO2 (2nm)/A1203 (1nm) layer with NRA, RBS, HRBS, HERD

Brijs, BertBertBrijsHuyghebaert, CedricCedricHuyghebaertNauwelaerts, SophieSophieNauwelaertsCaymax, MattyMattyCaymaxVandervorst, WilfriedWilfriedVandervorstNakajima, K.K.NakajimaKimura, K.K.KimuraBergmaier, A.A.BergmaierDollinger, G.G.DollingerLennard, W. N.W. N.LennardTerwagne, G.G.TerwagneVantomme, AndreAndreVantomme2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5098Quantification and depth profiling of a ZrO2 (2nm)/A1203 (1nm) layer with NRA, RBS, HRBS, HERDOral presentation