Study on processing step uniformity tuning during FET fabrication and sensor wafer response as a function of chuck temperature adjustment

Milenin, AlexeyAlexeyMileninBoullart, WernerWernerBoullartWen, YouxianYouxianWenQuli, FarhatFarhatQuli2021-10-222021-10-2220140021-4922https://imec-publications.be/handle/20.500.12860/24251Study on processing step uniformity tuning during FET fabrication and sensor wafer response as a function of chuck temperature adjustmentJournal articlehttp://dx.doi.org/10.7567/JJAP.53.03DC02