Lujan, GuilhermeGuilhermeLujanSchram, TomTomSchramSjoblom, G.G.SjoblomWitters, ThomasThomasWittersKubicek, StefanStefanKubicekDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsDe Meyer, KristinKristinDe Meyer2021-10-152021-10-152004-11https://imec-publications.be/handle/20.500.12860/9228Interface passivation mechanisms in metal gated oxide capacitorsProceedings paper