Insight into the aggravated lifetime reliability in advanced MOSFETs with strained Si channels on SiGe strain relaxed buffers due to self-heating

Agaiby, R.R.AgaibyO'Neill, A.GA.GO'NeillOlsen, S.HS.HOlsenEneman, GeertGeertEnemanVerheyen, PeterPeterVerheyenLoo, RogerRogerLooClaeys, CorCorClaeys2021-10-172021-10-1720080018-9383https://imec-publications.be/handle/20.500.12860/13291Insight into the aggravated lifetime reliability in advanced MOSFETs with strained Si channels on SiGe strain relaxed buffers due to self-heatingJournal article