Understanding Selectivity Loss Mechanisms in Selective Material Deposition by Area Deactivation on 10 nm Cu/SiO2 Patterns

Viva, AlessandroAlessandroVivaPasquali, MattiaMattiaPasqualiCarolan, PatrickPatrickCarolanSergeant, StefanieStefanieSergeantMeersschaut, JohanJohanMeersschautConard, ThierryThierryConardDe Gendt, StefanStefanDe GendtArmini, SilviaSilviaArmini2022-08-292022-05-062022-08-292022-03-292637-6113https://imec-publications.be/handle/20.500.12860/39760Understanding Selectivity Loss Mechanisms in Selective Material Deposition by Area Deactivation on 10 nm Cu/SiO2 PatternsJournal articlehttps://doi.org/10.1021/acsaelm.1c01348