An ultra-thin hybrid floating gate concept for sub-20nm NAND flash technologies

Wellekens, DirkDirkWellekensBlomme, PieterPieterBlommeRosmeulen, MaartenMaartenRosmeulenSchram, TomTomSchramCacciato, AntonioAntonioCacciatoVan Aerde, StevenStevenVan AerdeDebusschere, IngridIngridDebusschereVan Houdt, JanJanVan Houdt2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/20143An ultra-thin hybrid floating gate concept for sub-20nm NAND flash technologiesProceedings paper