Growth of thick [111]-oriented 3C-SiC films on T-shaped Si micropillars

Boninelli, S.S.BoninelliCalabretta, C.C.CalabrettaMancarella, F.F.MancarellaMauceri, M.M.MauceriCrippa, D.D.CrippaAlbani, M.M.AlbaniBergamaschini, R.R.BergamaschiniMiglio, L.L.MiglioLa Via, F.F.La ViaAgati, MartaMartaAgati2021-12-032021-11-022021-12-0320210264-1275WOS:000684813700005https://imec-publications.be/handle/20.500.12860/37641Growth of thick [111]-oriented 3C-SiC films on T-shaped Si micropillarsJournal article10.1016/j.matdes.2021.109833WOS:000684813700005EPITAXIAL-GROWTHSILICONFABRICATIONDEFECTS