Jourdan, NicolasNicolasJourdanCarbonell, LaureLaureCarbonellHeylen, NancyNancyHeylenSwerts, JohanJohanSwertsArmini, SilviaSilviaArminiMaestre Caro, ArantxaArantxaMaestre CaroDemuynck, StevenStevenDemuynckCroes, KristofKristofCroesBeyer, GeraldGeraldBeyerTokei, ZsoltZsoltTokeiVan Elshocht, SvenSvenVan ElshochtVancoille, EricEricVancoille2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19142Evaluation of metallization options for advanced Cu interconnects applicationProceedings paper