Vermang, BartBartVermangRothschild, AudeAudeRothschildRacz, A.A.RaczJohn, JoachimJoachimJohnPoortmans, JefJefPoortmansMertens, RobertRobertMertensPoodt, P.P.PoodtTiba, V.V.TibaRoozeboom, F.F.Roozeboom2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18286High speed atmospheric pressure ALD for industrial scale solar cell passivationProceedings paperhttp://www.photovoltaic-conference.com/