Goethals, FrederikFrederikGoethalsCiofi, IvanIvanCiofiMadia, OresteOresteMadiaVanstreels, KrisKrisVanstreelsBaklanov, MikhaïlMikhaïlBaklanovDetavernier, ChristopheChristopheDetavernierVan Der Voort, PascalPascalVan Der VoortVan Driessche, IsabelIsabelVan Driessche2021-10-202021-10-2020120959-9428https://imec-publications.be/handle/20.500.12860/20729Ultra low-k cyclic carbon-bridged PMO films with a high chemical resistanceJournal article