Houssa, MichelMichelHoussaDegraeve, RobinRobinDegraeveMertens, PaulPaulMertensHeyns, MarcMarcHeynsJeon, J. S.J. S.JeonHalliyal, A.A.HalliyalOgle, B.B.Ogle2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3519Electrical properties of thin SiON/Ta2O5 gate dielectric stacksJournal article