Challenges of dense and isolated structure patterning: depth loading study in STI

Song, YangYangSongMilenin, AlexeyAlexeyMilenin2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24551Challenges of dense and isolated structure patterning: depth loading study in STIOral presentationhttp://pesm2014.insight-outside.fr/index.php?langue=en&onglet=14&acces=&idUser=&emailUser=&PHPSESSID=a3ab919ce7af5a185bc62c2cbd6