A deep-level transient spectroscopy study of silicon interface states using different silicon nitride surface passivation schemes

Gong, ChunChunGongSimoen, EddyEddySimoenPosthuma, NielsNielsPosthumaVan Kerschaver, EmmanuelEmmanuelVan KerschaverPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-182021-10-1820100003-6951https://imec-publications.be/handle/20.500.12860/17159A deep-level transient spectroscopy study of silicon interface states using different silicon nitride surface passivation schemesJournal articlehttp://link.aip.org/link/?APL/96/103507