Electromechanical Equivalent Circuit Model for Axisymmetric PMUTs With Elastic Boundary Conditions

Chare, ChristopherChristopherChareGijsenbergh, PieterPieterGijsenberghJeong, YongbinYongbinJeongHeremans, PaulPaulHeremansCheyns, DavidDavidCheynsGenoe, JanJanGenoe2023-05-042023-05-0420221057-7157WOS:000761342700001https://imec-publications.be/handle/20.500.12860/41538Electromechanical Equivalent Circuit Model for Axisymmetric PMUTs With Elastic Boundary ConditionsJournal article10.1109/JMEMS.2022.3151245WOS:000761342700001MICROMACHINED ULTRASOUND TRANSDUCERSSOUND FIELDOPTIMIZATIONIMPEDANCEDISK