Abu Jeriban, SalimaSalimaAbu JeribanGuiot, Y.Y.GuiotBacherius, L.L.BacheriusProost, J.J.ProostSleeckx, ErikErikSleeckxVos, RitaRitaVosMertens, PaulPaulMertens2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13280Effect of dopants on the dissolution behavior of silicon substrates in HF-based cleaning solutionsProceedings paper