De Witte, HildeHildeDe WitteConard, ThierryThierryConardBender, HugoHugoBenderVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4284Analytical characterization of new high k dielectric stacksOral presentation