A novel approach of using STM and NC-AFM to study narrow trenches in an oxide matrix

Mannarino, ManuelManuelMannarinoChintala, Ravi ChandraRavi ChandraChintalaEyben, PierrePierreEybenVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24196A novel approach of using STM and NC-AFM to study narrow trenches in an oxide matrixMeeting abstract