On-chip surface enhanced raman spectroscopy using ALD grown plasmonic nanotrenches integrated with a silicon nitride slot waveguide

Raza, AliAliRazaClemmen, StephaneStephaneClemmenVan Daele, MichielMichielVan DaeleDendooven, JolienJolienDendoovenGriffiths, Matthew B.EMatthew B.EGriffithsBarry, Sean T.Sean T.BarrySkirtach, AndreAndreSkirtachDetavernier, ChristopheChristopheDetavernierBaets, RoelRoelBaets2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33878On-chip surface enhanced raman spectroscopy using ALD grown plasmonic nanotrenches integrated with a silicon nitride slot waveguideProceedings paper