Loo, RogerRogerLooShimura, YosukeYosukeShimuraIke, ShinichiShinichiIkeVohra, AnuragAnuragVohraStoica, TomaTomaStoicaBuca, DanDanBucaKohen, DavidDavidKohenMargetis, JoeJoeMargetisTolle, JohnJohnTolle2021-10-252021-10-252018-05https://imec-publications.be/handle/20.500.12860/31233Epitaxial GeSn: impact of process conditions on material qualityMeeting abstract