Halder, SandipSandipHalderMiller, AndyAndyMillerMaenhoudt, MireilleMireilleMaenhoudtBeyer, GeraldGeraldBeyerSwinnen, BartBartSwinnenBeyne, EricEricBeyneGrant, DavidDavidGrantMarx, DavidDavidMarxDudley, RussRussDudleyFord, MauriceMauriceFord2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20770Metrology and inspection requirements for 3D stacking of ICsProceedings paper