Physical properties of polycrystalline aluminium nitride films deposited by magnetron sputtering

Mortet, V.V.MortetNesladek, MilosMilosNesladekHaenen, K.K.HaenenMorel, A.A.MorelD'Olieslaeger, MarcMarcD'OlieslaegerVanecek, M.M.Vanecek2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9325Physical properties of polycrystalline aluminium nitride films deposited by magnetron sputteringJournal article