Hatta, S. W. M.S. W. M.HattaJi, J.J.JiZhang, J. F.J. F.ZhangDuan, M.M.DuanZhang, W. D.W. D.ZhangSoin, N.N.SoinKaczer, BenBenKaczerDe Gendt, StefanStefanDe GendtGroeseneken, GuidoGuidoGroeseneken2021-10-212021-10-2120130018-9383https://imec-publications.be/handle/20.500.12860/22464Energy distribution of positive charges in gate dielectric: probing technique and impacts of different defectsJournal article