Alternative metal recess for fully-self-aligned-vias

Contino, AntoninoAntoninoContinoLe, Quoc ToanQuoc ToanLeSakamoto, KeiKeiSakamotoSchleicher, FilipFilipSchleicherPaolillo, SaraSaraPaolilloPacco, AntoineAntoinePaccoKesters, ElsElsKestersLorant, ChristopheChristopheLorantMurdoch, GayleGayleMurdochLariviere, StephaneStephaneLariviereVega Gonzalez, VictorVictorVega GonzalezVersluijs, JankoJankoVersluijsJaenen, PatrickPatrickJaenenTeugels, LieveLieveTeugelsvan der Veen, MarleenMarleenvan der VeenJourdan, NicolasNicolasJourdanCiofi, IvanIvanCiofiBoccardi, GuillaumeGuillaumeBoccardiTokei, ZsoltZsoltTokeiWilson, ChrisChrisWilson2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/34929Alternative metal recess for fully-self-aligned-viasMeeting abstracthttps://www.web-events.net/doc/users/840/bib/globalprogramvf.pdf