Heyns, MarcMarcHeynsBearda, TwanTwanBeardaCornelissen, IngridIngridCornelissenDe Gendt, StefanStefanDe GendtKnotter, D. M.D. M.KnotterLoewenstein, LeeLeeLoewensteinLux, MarcelMarcelLuxMertens, PaulPaulMertensMertens, S.S.MertensMeuris, MarcMarcMeurisSchaekers, MarcMarcSchaekersSnee, PeterPeterSneeTeerlinck, IvoIvoTeerlinckVos, RitaRitaVos2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2633Cost-effective cleaning for advanced Si-processingProceedings paper