Non-destructive thickness determination of thin cobalt and cobalt disilicide layers on silicon substrates

Roca, ElisendaElisendaRocaVanhellemont, JanJanVanhellemontSchreutelkamp, RobRobSchreutelkampVermeiren, JanJanVermeiren2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/310Non-destructive thickness determination of thin cobalt and cobalt disilicide layers on silicon substratesJournal article