Ortolland, ClaudeClaudeOrtollandHoriguchi, NaotoNaotoHoriguchiKerner, ChristophChristophKernerChiarella, ThomasThomasChiarellaEyben, PierrePierreEybenEveraert, Jean-LucJean-LucEveraertAgua Borniquel, JoseJoseAgua BorniquelPoon, TseTsePoonSanthanam, KartikKartikSanthanamPorshnev, PeterPeterPorshnevFoad, MajeedMajeedFoadSchreutelkamp, RobertRobertSchreutelkampAbsil, PhilippePhilippeAbsilVandervorst, WilfriedWilfriedVandervorstFelch, SusanSusanFelchHoffmann, Thomas Y.Thomas Y.Hoffmann2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14255Performance enhancement of PFET planar devices by plasma immersion ion implantation (P3i)Proceedings paper