Interpretation of spectroscopic ellipsometry measurements of ultrathin dielectric layers on silicon: impact of accuracy of the silicon optical constants

Tonova, DianaDianaTonovaDepas, MichelMichelDepasVanhellemont, JanJanVanhellemont2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1536Interpretation of spectroscopic ellipsometry measurements of ultrathin dielectric layers on silicon: impact of accuracy of the silicon optical constantsJournal article