Frigeri, C.C.FrigeriSerenyi, M.M.SerenyiKhanh, N.Q.N.Q.KhanhCsik, A.A.CsikErdelyi, Z.Z.ErdelyiNasi, L.L.NasiBeke, D.L.D.L.BekeBoyen, Hans-GerdHans-GerdBoyen2021-10-192021-10-1920110232-1300https://imec-publications.be/handle/20.500.12860/18935Hydrogen release in annealed hydrogenated a-Si/a-Ge multilayersJournal article