Op de Beeck, MaaikeMaaikeOp de BeeckBruggeman, AlbertAlbertBruggemanBotermans, HarryHarryBotermansVan Driessche, VeerleVeerleVan DriesscheYen, AnthonyAnthonyYenTritchkov, AlexanderAlexanderTritchkovJonckheere, RikRikJonckheereRonse, KurtKurtRonseVan den hove, LucLucVan den hove2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1399Optical proximity effects and correction strategies for chemical amplified DUV resistsProceedings paper