Scanning spreading resistance microscopy and spectroscopy for routine and quantitative two-dimensional carrier profiling

Eyben, PierrePierreEybenXu, MingweiMingweiXuDuhayon, NatasjaNatasjaDuhayonClarysse, TrudoTrudoClarysseCallewaert, SvenSvenCallewaertVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6318Scanning spreading resistance microscopy and spectroscopy for routine and quantitative two-dimensional carrier profilingJournal article