Augendre, EmmanuelEmmanuelAugendreRooyackers, RitaRitaRooyackersPochet, SandrineSandrinePochetGrau, LluisLluisGrauSleeckx, ErikErikSleeckxVandamme, EwoutEwoutVandammeBadenes, GonçalGonçalBadenes2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5021Optimisation of active area edge protection in shallow trench isolationProceedings paper