Micro-uniformity during laser anneal: metrology and physics

Vandervorst, WilfriedWilfriedVandervorstRosseel, ErikErikRosseelLin, R.R.LinPetersen, D.H.D.H.PetersenClarysse, TrudoTrudoClarysseGoossens, JozefienJozefienGoossensNielsen, P.F.P.F.NielsenChurton, K.K.Churton2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14709Micro-uniformity during laser anneal: metrology and physicsProceedings paper