Passivation of a metal contact with a tunneling layer

Loozen, XavierXavierLoozenLarsen, Jakob B.Jakob B.LarsenDross, FredericFredericDrossAleman, MonicaMonicaAlemanBearda, TwanTwanBeardaO'Sullivan, BarryBarryO'SullivanGordon, IvanIvanGordonPoortmans, JefJefPoortmans2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19337Passivation of a metal contact with a tunneling layerProceedings paperhttp://www.metallizationworkshop.eu/program/