WS2 transistors on 300 mm wafers with BEOL compatibility

Schram, TomTomSchramSmets, QuentinQuentinSmetsGroven, BenjaminBenjaminGrovenHeyne, MarkusMarkusHeyneKunnen, EddyEddyKunnenThiam, ArameArameThiamDevriendt, KatiaKatiaDevriendtDelabie, AnneliesAnneliesDelabieLin, DennisDennisLinLux, MarcelMarcelLuxChiappe, DanieleDanieleChiappeAsselberghs, IngeIngeAsselberghsBrus, StephanStephanBrusHuyghebaert, CedricCedricHuyghebaertSayan, SafakSafakSayanJuncker, AurélieAurélieJunckerCaymax, MattyMattyCaymaxRadu, IulianaIulianaRadu2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29392WS2 transistors on 300 mm wafers with BEOL compatibilityProceedings paperhttp://ieeexplore.ieee.org/document/8066629/