Combining SILC and BD statistics for low-voltage lifetime projection in HK/MG stacks

Vici, AndreaAndreaViciDegraeve, RobinRobinDegraeveBastos, JoaoJoaoBastosRoussel, PhilippePhilippeRousselDe Wolf, IngridIngridDe Wolf2023-04-262023-02-272023-04-2620221541-7026WOS:000922926400126https://imec-publications.be/handle/20.500.12860/41167Combining SILC and BD statistics for low-voltage lifetime projection in HK/MG stacksProceedings paper10.1109/IRPS48227.2022.9764555978-1-6654-7950-9WOS:000922926400126TRAP GENERATIONMODEL