Influence of pulse duration in picosecond laser ablation of silicon nitride layers

Schulz-Ruhtenberg, MalteMalteSchulz-RuhtenbergTrusheim, DanielDanielTrusheimDas, JoJoDasKrantz, StephanStephanKrantzWieduwilt, JanJanWieduwilt2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19754Influence of pulse duration in picosecond laser ablation of silicon nitride layersProceedings paper