Advanced nanoanalysis of a Hf-based high-k dielectric stack prior to activation

MacKenzie, M.M.MacKenzieCraven, A.J.A.J.CravenMcComb, D.W.D.W.McCombDe Gendt, StefanStefanDe GendtDocherty, F.T.F.T.DochertyMcGilvery, C.M.C.M.McGilveryMcFadzean, S.S.McFadzean2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12533Advanced nanoanalysis of a Hf-based high-k dielectric stack prior to activationJournal article