Interface nature of oxidized single-crystal arrays of etched Si nanowires on (100) Si

Jivanescu, MihaelaMihaelaJivanescuStesmans, AndreAndreStesmansKurstjens, RufiRufiKurstjensDross, FredericFredericDross2021-10-202021-10-2020120003-6951https://imec-publications.be/handle/20.500.12860/20871Interface nature of oxidized single-crystal arrays of etched Si nanowires on (100) SiJournal articlehttp://dx.doi.org/10.1063/1.3682315