Nanoscale effects of annealing on the electrical characteristic of hafnium based devices measured in a vacuum environment

Aguilera, LidiaLidiaAguileraPolspoel, WouterWouterPolspoelPorti, MarcMarcPortiVandervorst, WilfriedWilfriedVandervorstNafria, MontserratMontserratNafriaAymerich, XavierXavierAymerich2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13294Nanoscale effects of annealing on the electrical characteristic of hafnium based devices measured in a vacuum environmentProceedings paper