Selective wet-etching of silicon germanium in composite vertical nanowires

Baraissov, ZhaslanZhaslanBaraissovPacco, AntoineAntoinePaccoKoneti, SiddardhaSiddardhaKonetiBisht, GeetaGeetaBishtPanciera, FedericoFedericoPancieraHolsteyns, FrankFrankHolsteynsMirsaidov, UtkurUtkurMirsaidov2021-10-272021-10-2720191944-8244https://imec-publications.be/handle/20.500.12860/32492Selective wet-etching of silicon germanium in composite vertical nanowiresJournal articlehttps://doi.org/10.1021/acsami.9b11934