Vincent, BenjaminBenjaminVincentFirrincieli, AndreaAndreaFirrincieliWang, Wei-EWei-EWangWaldron, NiamhNiamhWaldronFranquet, AlexisAlexisFranquetDouhard, BastienBastienDouhardVandervorst, WilfriedWilfriedVandervorstClarysse, TrudoTrudoClarysseBrammertz, GuyGuyBrammertzLoo, RogerRogerLooDekoster, JohanJohanDekosterMeuris, MarcMarcMeurisCaymax, MattyMattyCaymax2021-10-192021-10-1920110013-4651https://imec-publications.be/handle/20.500.12860/20092Ge chemical vapor deposition on GaAs for low resistivity contactsJournal article