Montero Alvarez, DanielDanielMontero AlvarezMarien, PhilippePhilippeMarienHermans, YannickYannickHermansVega Gonzalez, VictorVictorVega GonzalezFeurprier, Y.Y.FeurprierOikawa, N.N.OikawaBuccheri, NunzioNunzioBuccheriWu, ChenChenWuMartinez Alanis, Gerardo TadeoGerardo TadeoMartinez AlanisBatuk, DmitryDmitryBatukPuliyalil, HarinarayananHarinarayananPuliyalilDecoster, StefanStefanDecosterKumar, K.K.KumarLazzarino, FredericFredericLazzarinoMurdoch, GayleGayleMurdochPark, SeonghoSeonghoParkTokei, ZsoltZsoltTokei2024-05-232023-08-072024-05-2320232380-632XWOS:001027381700031https://imec-publications.be/handle/20.500.12860/42287Improving uniformity of 3-level High Aspect Ratio SuperviasProceedings paper10.1109/IITC/MAM57687.2023.10154787979-8-3503-1097-9WOS:001027381700031